Pambuka operator wafer
KATEGORI PRODUK
▶Sistem Pembawa Wafer kanggo Proses PECVD & TALOX
• Perahu Grafit PECVD & TALOX (M4~M12)
• Vertikal SM-Boat (M4, M6)
• Implan & Shower Bagean Grafit (M4~M6)
• C / C Tray & Coating Keramik
• Metal RIE-Tray & Coating Keramik
• Vacuum Sealing: O-Ring & SQ-Ring
▶Proses Transfer Tekstur & Etsa Basah
• LSC H-Carrier utawa kaset (M4~M12)
• LSC V-Carrier utawa kaset (M4~M12)
• Pembawa utawa kaset ASC (M4, M6)
• W/F Carrier & Storage Box (M4~M12)
• Transport Wheel (Roller) Series
▶Pembawa Sel Surya & Pembawa Logam
• TRC Carrier utawa kaset (M4~M12)
• Majalah (karo BELT)
GRAPHITE BOAT (H-Type)
19P6-216CT (WF M4~M12)
GRAPHITE BOAT (H-Type)
21P6-240CT WF M4~M12)
GRAPHITE BOAT (H-Type)
23P7-308CT(W/F M4~M12)
GRAPHITE BOAT (H-Type)
22P/7-294TP (W/F M4~M12)
GRAPHITE BOAT (H-Type)
W182-22P7-294CT (W/F M12)
W182-21P6-240CT (W/F M12)
WF CARRIER & KOTAK STORAGE (~M12)
C/C TRAY utawa CARRIER (M4~M10)
C/C TRAY utawa CARRIER (M4~M10)
KAPAL VERTIKAL (SM) M6
LSC-H-CARRIER(~M12)
LSC-V-CARRIER(~M12)
ASC CARRIER (~M6)
TRC CARRIER(~M12)
TRC CARRIER(~M12)
GRAPHITE-BOAT(M12)
Sistem Wafer Carrier kanggo Proses PECVD
▶ GRAPHITE BOAT (CT-Designed) Proses M10/M12
• KONSEP DESIGN KHUSUS
▶ GRAPHITE BOAT (CT-Designed) Proses M4/M6
▶ Bagian Aksesoris BOAT
▶ KAPAL VERTIKAL-161.7mm WAFER
▶ VERTICAL BOAT-166mm WAFER
▶ KAPAL VERTIKAL-161.7mm, 166mm WAFER
Pembawa Sel Surya & Pembawa TRC Logam
JENIS: Otomasi
UKURAN WAFER : ① 156 × 156 MM ② 156,75 × 156,75 MM
③161.7x161.7mm ④166x166mm
⑤ 180×180mm ⑥ 210×210mm
PENGGUNAAN: Nggawa (Kaset)
KAPASITAS: 100 lembar
UKURAN: 4.76 MM/5.953 MM/6.35 MM
DIMENSI: Kira-kira 559 × 220 × 220 MM
Kira-kira 712 × 260 × 260 MM
Kaluwihan: Suasana
MATERIAL: FLAME, SIDE BAR-Aluminium (anodizing)
SIDE PLATE-POM (Antistatik)
Tutup bar ngisor-EPDM/PU/VITON (ASE)
TRC-METAL CARRIER (U'SER LINE)
TRC-METAL CARRIER (U'SER LINE)
TRC-METAL CARRIER (U'SER LINE)
SHOWER PLATE & IMPLANT, CARRIER
